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Tobias Fiedler, Sergiy Yulin, Norbert Kaiser, Andreas Tünnermann, FraunhoferInstitut für Angewandte Optik und Feinmechanik (Germany Norbert. 8680-20 S6, 868020 S8, 8685-29 SPS Fernandez-Cuesta, Irene 8680-27 S8 Fiedler, Tobias 8679-12 S3 Figueiro, Nivea. 8683-47 S11 Tzai, Wei-Jhe 8681-69 SPS1, 8681-97 SPS1 Tzviatkov, Plamen 8682 Program Committee, 8682 S7 Session Chair U Ueda, Kazuhiro 8681-82 SPS1 Uesugi, Takuji 8682-62 SPS3 Ugurlu, Ozan 8681-6 S2 Ukraintsev, Vladimir. (Korea, Republic of Seiji Samukawa, Tohoku Univ. SPS1, 8683 Program Committee, 8683 S11 Session Chair Brown, Daniel. (Japan Jo Finders, asml Netherlands.V. (United States Brian. (Korea, Republic of Minoru Harada, Yohei Minekawa, Hitachi, Ltd. Tuesday 26 February Conference 8682 Conference 8683 Conference 8684 Conference 8685 Advances in Resist Materials and Processing Technology XXX Optical Microlithography xxvi Design for Manufacturability through Design-Process Integration VII Advanced Etch Technology for Nanopatterning II Session 7 Room: Marriott San Jose Ballroom Salon III Tue. 8679-12 S3, 867951 S11, 8679-89 SPS1 Fonseca, Carlos 8683 Program Committee, 8683 S4 Session Chair Foong, Yee Mei 8683-20 S5, 8683-57 SPS1, 8683-76 SPS1 Foord, David 8681-6 S2 Ford, Carl 8681-2 S2 Foubert, Philippe SPS1 Foucher, Johann 8680-37 S10, 868138 S10, 8681-5 S2, 8681-51 S13.

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